Products/Services

Thermal Probes

PicoCal offer a number of thermal probes including: polymer, silicon, and silicon nitride

PICOCAL's high precision, non-destructive technique is based on a proprietary micromachined (MEMS) scanning thermal probe. The probe tip in the figure has less than 100 nm diameter. PicoCals thermal probe is scanned across the sample and measurements are made at every location.

Key probe features include:

• High thermal sensitivity due to high thermal isolation
• High thermal resolution
• Mondestructive (low spring constant prevents damage to sample)
• High reliability and repeatability in probes performance by using batch processing
• High spatial resolution with integrated tip with less than 100 nm tip diameter

Modes of Operation:

• Thermal conductance mapping
• Temperature mapping
• Topographical mapping
• Subsurface Mapping
• Mapping of thermal properties (thermal conductivity, heat capacity etc.)

Some Applications include:

• Subsurface imaging
• Defect detection
• Nanocharacterization
• Biological imaging
• Photoresist metrology

Tech Specs:

• Tempature Range: 0 - 550 C (depending on the probe type)
• Nominal Resistance: 30 - 60 Ohm
• Temperature coefficient of resistance ~ 1,600 ppm/C +/- 20%
• Tip diameter < 100 nm
• Topographical resolution < 1 nm

Purchasing: Minimum order of 10 probes.