PCTP100 Thermal Probes
PICOCALs high precision, non-destructive technique is based on a proprietary micromachined (MEMS) scanning thermal probe. The probe tip in the figure has less than 100 nm diameter. PicoCals thermal probe is scanned across the sample and measurements are made at every location.
Key probe features include: high thermal sensitivity due to high thermal isolation, high thermal resolution, mondestructive (low spring constant prevents damage to sample), high reliability and repeatability in probes performance by using batch processing, and high spatial resolution with integrated tip with less than 100 nm tip diameter.
Modes of Operation: Thermal conductance mapping; Temperature mapping; Topographical mapping; Subsurface Mapping; Microcalorimetry and glass transition temperature; Mapping of thermal properties (thermal conductivity, heat capacity etc.)
Some Applications include: Subsurface imaging, defect detection, nanocharacterization, characterize thin polymers, biological imaging, and photoresist metrology
Measured Probe Performance: Lateral Spatial Resolution < 100 nm; Tip Temperature Resolution < 10 mK; Change Thermal Conductance < 3 pW/K; Spring Constant < 0.1 N/m.
Purchasing: Minimum order of 10 probes. Allow 30-60 days for delivery.